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16,574 cited entries · 4 axes

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01Metrology & Inspection1120 02Test & Probe888 03Etch509 04Packaging & Bonding466 05Deposition434 06Lithography410 07Thermal / Diffusion389 08Precision Optics261 09Lab & Support Equipment242 10Dicing & Grinding216 11Wet Processing / Clean209 12Assembly / SMT166 13CMP156 14Ion Implantation147 15Resist Processing64 16Spin coater12 17oscilloscope10 18Insert carrier / lapping carrier5 19insert carrier / lapping carrier4 20Recirculating chiller3 21dot matrix printer3 22Passenger locomotive3 23Ophthalmic coating system3 24Micropositioner2 25diesel-electric passenger locomotive2 26Spin coater / spin processor2 27E-gun2 28CT system2 29machine vision-based CMM2 30Electrical measurement2 31UV intensity meter2 32Single Wafer Resist Stripper2 33Machine vision-based CMM2 34Reflectometry2 35Dual function VB/VP & image reversal system2 36Measurement2 37Film Thickness Measurement2 38electron beam source2 39Spin Rinser/Dryer2 40thin-film thickness measurement instrument2 41spin coater2 42Substrate holder2 43machine vision system2 44Spin processor1 45Production MBE system1 46Thermal Process1 47Wet Station1 48Tabletop vacuum curing system1 49Hall measurement system1 50Characterization1 51horizontal vacuum low-pressure steam sterilizer1 52Nano and Micro Fabrication1 53general-purpose machine vision system1 54Automated Thickness Mapping Systems1 55Dimpler1 56MBE Sources1 57recirculating chiller1 58Vacuum coating system1 59Microwave Downstream Plasma Asher1 60Passenger locomotives1 61Photoresist spin station1 62Barrel type photoresist asher1 63Ion mill1 6480-column dot matrix printer1 65Special tool1 66Zwangskonvektionsofen1 67Film thickness measurement system1 68Spinner1 69Electrical measurement instrument1 70mini-printer1 71Thin-Film/Material Analysis1 72thickness measurement instrument1 73Thin-film thickness measurement system1 74Film thickness mapping tool1 75Plasma Strip/Descum System1 76Fully Automated Ophthalmic Coating System1 77Spectroscopic ellipsometer1 78Coating component1 79Microtome1 80Connectivity software1 81Anti-reflection coating measurement system1 82Surface profiler1 83special tool1 84printer1 85Spin Coater1 86advanced cluster platform1 87Insert carrier1 88Critical point dryer1 89laboratory C-SAM instrument1 90simultaneous reflectance and transmittance measurement instrument1 91thin-film thickness measurement system1 92low temperature plasma activation system1 93laser welder1 94spin controller1 95Pattern Generator1 96Ultrasonic Microstructural Analyzer1 97Thermal Processing1 98gas distribution system / pressure controller1 99Parylene thickness measurement system1 100Single-wafer downstream plasma stripper/descummer1 101characterization equipment1 102Automated polyimide curing tool1 103Film thickness mapping instrument1 104inkjet cartridge1 105ellipsometry1 106Mini wet station1 107thermal probing system1 108computer1 109connector1 110insert carrier1 111terrestrial network management system1 112Resistivity system1 113Digital signal processing board1 114Wet chemistry1 115Automatic Coating and Developing Tool1 116Assembly Work Cell1 117Operation and Maintenance1 118Profiling system1 119throttle valve1 120Film thickness mapping tool for patterned wafers1 121Solar Cell Simulator1 122Spinner/Hotplate1 123Tape & Reel equipment1 124Characterization equipment1 125MPT Application1 126Ion source1 127Spinner controller1 128minicomputer1 129Conductive epoxy dispenser1 130Ellipsometer1 131Network analyzer1 132Nanoengineering EBL tool1 133Surface Profiler1 134cluster platform1 135Film thickness mapping system for patterned wafers1 136machine vision-based coordinate-measuring machine1 137In-line thickness measurement system1 138Contact angle goniometer1 139Backend1 1401st Stage / Carcass Drums1 141DRIE1 142Parylene coater1 143PCB prototyping machine1 144E-gun source1 145Plasma strip/descum system1 146systems1 147photoresist spin station1 148RFID chip attach equipment1 149SMIF / isolation / wafer management system1 150Semiconductor1 151amino acid analyzer1 152Accessories1 153Ultraviolet decontamination chamber1 154film-measurement instrument1 155Electron beam power supply1 156NMR system1 157Insert carriers / lapping carriers1 158Develop spinner1 159film thickness mapping instrument1 160Sample coater for scanning electron imaging1 161Infrarot-Ofentrockner / Brennofen1 162Interconnect profiling system1 163machine vision-based dimensional measurement system1 164Vapor Prime / Image Reversal / Silylation system1 165Hardcoat Thickness Measurement Instrument1

166Applied Materials1522 167KLA579 168Agilent355 169Lam Research311 170Nikon303 171Tokyo Electron291 172Hitachi223 173SCREEN210 174Keysight184 175SUSS MicroTec179 176Tektronix178 177Thermo Fisher176 178Advantest169 179Teradyne152 180Disco144 181Onto Innovation124 182ASM121 183Edwards105 184Olympus104 185Axcelis101 186Canon100 187Pfeiffer98 188ASML97 189YES96 190MKS96 191Semitool91 192Accretech88 193Bruker84 194Advanced Energy77 195Veeco77 196Varian75 197West Bond71 198Kulicke & Soffa70 199Plasma-Therm67 200Oxford Instruments67 201Brooks67 202Strasbaugh66 203Panasonic66 204EV Group66 205JDSU66 206Blue M63 207Esec62 208Perkin Elmer62 209Ulvac62 210Zeiss60 211Nordson59 212ESPEC55 213Seiko Epson53 214Laurell47 215Juki46 216Zygo46 217Tegal45 218Leybold45 219Electroglas44 220Aixtron43 221CHA42 222LTX-Credence39 223Temescal38 224Mitutoyo38 225Heller36 226SVG36 227Fuji32 228Thermotron31 229Filmetrics31 230Newport31 231Takatori30 232Denton Vacuum29 233ESI29 234Signatone27 235Nitto27 236Cascade Microtech26 237Branson26 238MPI26 239ENI26 240Besi25 241PR Hoffman25 242Multitest24 243Lapmaster24 244Sumitomo24 245SPTS24 246Mattson23 247Espec23 248Shinkawa23 249CEE22 250Asyst22 251OAI22 252Neslab22 253Wyko22 254Despatch21 255Samsung21 256Koh Young21 257Chroma20 258SMC20 259Rigaku20 260Speedline20 261Ultratech20 262Hesse & Knipps20 263Cohu20 264Dek19 265Siemens19 266Lindberg19 267Logitech19 268Palomar18 269Yamaha18 270DAIHEN18 271Ismeca17 272Genmark17 273Tenney17 274Rorze16 275Meyer Burger16 276Micromanipulator16 277Optorun16 278BTU16 279Buehler16 280STS16 281AJA16 282MRSI15 283Micro-Vu15 284Camtek15 285Leica14 286Malvern Panalytical14 287CyberOptics14 288JEOL13 289Vitronics13 290Nutek13 291Ultron13 292Hanwha13 293Nissin13 294Mydata12 295Yaskawa12 296View Engineering12 297GCA12 298Sonix12 299SSEC11 300Headway10 301SCIEX10 302ADT10 303Comdel9 304Finetech9 305Test Research9 306Trumpf9 307Ontrak9 308Blanchard8 309FormFactor8 310Coherent8 311Thermco8 312DEK8 313Eagle8 314Karl Suss7 315LPKF7 316Glenbrook7 317OGP7 318Electrovert7 319Towa7 320Sonoscan7 321Spea6 322MPM6 323RECIF6 324Exatron6 325Semics6 326Brewer Science6 327Wafab6 328Maury Microwave6 329Fico6 330Spectra-Physics6 331F&K Delvotec6 332Tystar6 333YXLON6 334Nova6 335Nanospec5 336Kawasaki5 337Rasco5 338ERSA5 339Mellen5 340Assembleon5 341Struers5 342Woollam5 343Balzers5 344Seren4 345Solitec4 346MyData4 347TechWing4 348Allied High Tech4 349ABM4 350ADE4 351Quintel4 352Rame Hart4 353Orbotech4 354Raith4 355Nanometrics4 356Melles Griot4 357Kensington4 358Mahr4 359Gaertner4 360Dektak4 361Santa Clara Plastics4 362Novellus4 363Staubli3 364TEGAL3 365Trion3 366Riber3 367Hontech3 368VAT3 369Heidelberg Instruments3 370IPG3 371Kurt Lesker3 372Rudolph3 373LEO3 374Yxlon3 375Universal Instruments3 376Rofin3 377LAM RESEARCH2 378ADVANTEST2 379Rehm2 380Audio DEV2 381PVA TePla2 382Parmi2 383Specialty Coating Systems2 384Proton2 385GigaMat2 386Angstrom Engineering2 387Optimum2 388Alcatel2 389August2 390Dynapace2 391HITACHI2 392Dage2 393GKG2 394Chemical Safety Technology2 395Datacon2 396STEAG1 397Cymer1 398Tri1 399J.A. Woollam1 400Orient Service1 401CANON1 402Simplimatic1 403Aeroflex1 404CAMTEK1 405Therma-Wave1 406South Bay Technology1 407Hamatech1 408Bruce1 409Eaton1 410DISCO1 411Thermawave1 412MicroCraft1 413MATTSON1 414FitTech1 415Hybond1 416Asahi1 417AccoTest1 418HONTECH1 419memsstar1 420NIKON1 421Toho Technology1 422Tousimis1 423Tescan1 424Nanoscribe1 425Keyence1 426FEI1 427Epilog1

428200mm66 429150mm48 430100mm41 431300mm39 4324"36 4336"21 4348"17 4358-inch9 4363"9 437Wafer Equipment7 4382"6 439Manual wafer load substrate bonder4 440Wafer Handler3 441Wafer Loader3 442Single wafer3 44312"3 44476mm3 44525 Wafer Slot Cassette2 44675 mm, 100 mm, 125 mm, and 150 mm diameter wafers; 4-inch square wafers2 4473 in, 4 in, 5 in, 6 in, 8 in, 12 in2 448Batch Solvent Processor for Wafer Cleaning2 4495"2 450For Wafer Centering Device2 4518 in. wafers2 452Single Foup Wafer Loader (Right)2 45310 in.2 454up to 6-inch wafers2 455Wafer table with wafer expander for 8”2 45650mm2 457Wafer Mapping2 458up to Φ8”2 4596 in2 4606 in.2 4616-inch diameter stage2 46275 mm to 100 mm2 46375 mm to 150 mm round substrates; rectangular substrates from 100 mm to 125 mm on a side2 464Wafer ID Reader2 4656-inch capability1 4666-inch diameter microchamber and thermal chuck1 4676-inch wafers1 4686” wafer loading through the loadlock is possible1 4697 inches in diameter usable area1 47075 mm to 150 mm round substrates; square and rectangular substrates1 47175mm to 200mm wafers1 4728 in (190-1600 nm)1 4738-inch wafers1 474A 1KW lamp for wafer heating1 475Auto Alignment System (Needle Tip, Wafer)1 476Auto loader (EFEM), wafer transfer system, load lock chamber, process chamber, operation panel.1 477Automated Wafer Handler1 478Automatic Beam Alignment on wafer1 479Bare Wafer Inspection Station1 480Bare wafer inspection station1 481Below Wafer1 482Brooks TM (Transfer Module) with four Wafer Manual Load Lock1 483Can produce wafer as-is1 484Capable of thermo compression, fusion or anodic wafer bonding1 485Capable of working with wafer masks up to 9″ x 9″1 486Cassette to Cassette Single Wafer Etcher1 487Ceramic high stability wafer chuck1 488Continuous clampable wafer table for dry WSs: Absent1 489DBM 2407 V 2 Wafer Handling Robot1 490Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch1 491Does not have the exposure optics. It is just a manual aligner for wafer bonding1 492Dual cassette wafer handling1 493Entegris FA 200-85 MT 7902 Wafer Cassette1 494For nondestructive wafer analysis1 495Franklin Mechanical wafer loader1 496Front & Backside Wafer ID Reader (RFID)1 497Full Wafer Dual Beam1 498Grip Ring Holder or Wafer frame1 499High precision micrometer for wafer alignment adjustment1 500Ideal for photovoltaic, wafer, and coating characterization (solar cell reflectance and antireflection studies)1 501In Air Wafer Handling:1 502In-Vacuum Wafer Robotic Transfer System1 503In-process wafer thickness measurement on Z1 & Z21 504Includes PSC Calibration Wafer1 505Includes thin wafer handling kit1 506Inspection/Wafer Visual /6in.1 507Integrated Wafer Cleaning System with Atomizing Nozzle1 508Interface Unit (IRA) for Canon FPA-3000 i5 stepper including one multi-buffer unit and Wafer edge exposure (WEE)1 509Lam 9600 FEFG, Lam Research, Offline , Metal Etcher,1 510Laser Wafer Mapping1 511Linear Wafer Tracks1 512Load port-TDK with wafer mapping and RFID reader1 513Manual wafer loading1 514Manual wafer lock1 515Mask / Wafer Handling:1 516Mini-Environment Wafer Loading Module (EFEM)1 517Mk1 3 KW lamp (provide wafer heating)1 518Motorized swivel arm Wafer loading trays required for desired wafer size ic devices.1 519Multiple IOSS Wafer ID Reader1 520Multiple wafer disks1 521Nicolet, Scientific, Thermo 6700 FT-IR SPECTROMETER, MAP300 and Wafer Stage1 522No wafer handler1 523No wafer top-side bar reading1 524One wafer manual loader1 525Only one wafer size at a time1 526Parallel wafer flow processing software option (simultaneous coat & develop)1 527Patented Wafer Chuck or Holding Device1 528Platen3 - Wafer Buff1 529Quartz Wafer1 530Robot Unit– automated wafer handling between cassettes and chuck tables.1 531Robot Wafer handling1 532Robotic Wafer Handler:1 533STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8” Documents1 534Samples ranging in size from 10mm to 150mm1 535Si Wafer1 536Silicon and Silicon on Insulator (SOI) wafers1 537Single FOUP Wafer Loader (Right)1 538Single Wafer (LOP)1 539Single Wafer Loader1 540Single Wafer SiC Substrate1 541Single-Wafer Chamber for Deep Silicon Etch1 542Standard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it1 543Supports non-standard wafer types (Mems, Taiko, Thin)1 544Taiko wafer adapter1 545The direction of wafer flow is right to left1 546Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer1 547Tool scans a wafer in a meander path1 548Universal wafer handler1 549Up to 50 wafers per batch (two 25-wafer cassettes)1 550Up to 6-inch wafers1 551Up to 8-inch wafers1 552Wafer Alignment:1 553Wafer Backside Rinse1 554Wafer Coating System Configuration1 555Wafer Cooling1 556Wafer Developing System Configuration1 557Wafer Hander:1 558Wafer Handling1 559Wafer I Cassette Handling1 560Wafer I.D Reading1 561Wafer Loader Blade Control PCB1 562Wafer Notch Visual Monitoring Alignment Option1 563Wafer Orienter1 564Wafer Position Detect1 565Wafer Profiler Kit1 566Wafer Ring Holder,1 567Wafer Stage1 568Wafer Stage Motor & Drive1 569Wafer System:1 570Wafer Table1 571Wafer Thickness 350μm ~ 1100μm1 572Wafer Thickness Measurement1 573Wafer Tilt Monitor1 574Wafer Transfer1 575Wafer Transfer Machine1 576Wafer Transfer Robot x 1 (1 Block System)1 577Wafer Transfer Robot:1 578Wafer Transfer System1 579Wafer X-Axis is out of order1 580Wafer auto load/unload1 581Wafer bonding at pressures 5e-5 to 3e-3 Torr and 50*C to 550*C1 582Wafer chambers1 583Wafer chuck (1)1 584Wafer chuck and standard sample holder1 585Wafer end effector1 586Wafer handler1 587Wafer imaging ability; entire surface of 8” or 12” wafer1 588Wafer kit sensor1 589Wafer loader1 590Wafer loss sensor1 591Wafer on Gripper Sensor1 592Wafer orientor1 593Wafer processing modules (2)1 594Wafer rotation option1 595Wafer table1 596Wafer tilt1 597Wafer transfer module1 598Wafer transport check1 599Warped Wafer Handling to 500 um1 600Whole wafers 75 mm-300 mm; sawn wafers up to 300 mm on film frames1 601for Si and SiC base wafer1 602in-vacuum wafer robotic transfer system1 603planetary wafer system1 604the sensor on the wafer chuck does not illuminate, although the inspection function remains operational1 605three inch square device / substrate chuck1 606three- to six-inch wafers1 607up to 12 in wafers1 608up to 450mm wafer size1 609up to 450°C1 610up to 6 in diameter1 611up to 6 in wafers1 612up to 6-inch diameter wafers; substrate size approximately 10 x 10 mm up to 100 mm, with 150 mm possible1 613up to 8-inch diameter substrates1 614up to 8-inch diameter wafers1 615up to 8-inch wafers1 616up to Φ8” workpieces1 617w/ TH 200 Wafer Loader1 618wafers up to 4″ (MA4) or 6″ (MA6); also 1 cm² pieces1 619Φ6'1 620φ2’, φ4’, φ6’, φ8’ single wafer auto transfer1 621(1) Wafer Orienter Chamber1 622・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil1 623(2) 25-wafer ADOE FOUP Load ports1 6241 x Tube, 2 x Wafer1 62510 Site Disk, 10 Wafer per Batch1 62610 in. system1 62712 in.1 628125 Wafer Load Size1 629125mm1 63015-20” adjustable length from source to wafer1 63116 inch / 400 mm1 6322 Independent loadports, 25 wafer front opening unified pod (FOUP) carrier1 6332 in, 4 in, 6 in, 8 in1 6342 to 6 in.1 6352-inch, 2.5-inch, or 3-inch wafers; optionally 4×4-inch, 3.5×3.5-inch, or 3×3-inch masks1 63622 in1 63725 wafer load ports (Asyst) with robot transfer (2 paddies)1 63825-wafer FOUP Loadports (3)1 63925-wafer batch1 6402nd EPROM has the firmware for wafer cassettes (in spare)1 6413 Station Wafer Handler1 6424 in1 6434 in, 5-6 in, 8 in, 12 in1 6444 in. wafers; 5-8 in. wafers1 6454 to 141 6464-inch1 6474-inch wafers1 6484-inch wafers; 5-6-inch wafers; 8-inch wafers; 12-inch wafers1 6494-inch wafers; convertible to 3-inch or 6-inch platforms1 6504-inch, 5-inch, 6-inch1 6514-inch, 5-inch, 6-inch, 8-inch1 652450 x 500 mm1 6534” to 12”1 6545 in, 6 in, or 4 in wafers1 6555-6 in. wafers; 8 in. wafers; 12 in. wafers1 656525 um +/- 25 um sample thickness default configuration1 6576 in. system1 6586-8 in. (Auto Detect)1

659Discontinued33 660Legacy32 661Cancelled1 662Mature1 663Pre-production1 664Latest model1 665Latest locomotive in the MPXpress family1

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