Waferpedia

Tool family

Brooks PRE 200 200 B 201 201 B Wafer Pre-Aligner

Models in this family

  1. The Brooks / PRI PRE 200 / 200 B / 201 / 201 B is a wafer pre-aligner used in semiconductor manufacturing, handling 6-inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    PRE 200———Equipment inventory listing[1]
    200 B———Equipment inventory listing[1]
    201———Equipment inventory listing[1]
    201 B———Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing