Tool family

ASML TWINSCAN EXE:5200B

The TWINSCAN EXE:5200B is a dual-stage extreme ultraviolet (EUV) lithography system designed to support volume production of sub-2 nm Logic nodes and leading-edge DRAM nodes.

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Models in this family

TWINSCAN EXE:5200BHigh NA
The TWINSCAN EXE:5200B is a dual-stage extreme ultraviolet (EUV) lithography system designed to support volume production of sub-2 nm Logic nodes and leading-edge DRAM nodes.
Cited variants
Designation Generation Vintage Changes Source
TWINSCAN EXE:5000 High NA — First in the EXE generation; supports advanced Logic and Memory chip production. asml.com^[1]

Designation	Generation	Vintage	Changes	Source
TWINSCAN EXE:5000	High NA	—	First in the EXE generation; supports advanced Logic and Memory chip production.	asml.com^[1]

Sources

Sources (1)Every fact above is drawn from these public sources

[1]asml.comasml.com