Waferpedia

Tool family

Perkin Elmer Diode Ion

Perkin Elmer1 entry

Models in this family

  1. The Perkin Elmer Diode Ion is a line of diode ion vacuum pumps with pumping speeds including 20 L/S, 25 L/S, and 220 L/S.

    Cited variants

    DesignationGenerationVintageChangesSource
    203-2000——Pumping speed: 20 L/Swaferpedia.com[1]
    203-2500——Pumping speed: 25 L/Ssurplus.ucsd.edu[2]
    RPE-220-DI——Rebuilt version, 220 L/s, 8.00" CFF flangeduniway.com[3]

Sources

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]surplus.ucsd.edusurplus.ucsd.edu
  3. [3]duniway.comduniway.com