Waferpedia

Tool family

Varian 2100CD

Varian1 entry

The Varian 2100CD is a high-energy linear accelerator manufactured between 1987 and 2007, part of the Clinac 2100 series, equipped with klystron power source, electron energies, and optional portal imaging, with multi-leaf collimator options of 80 or 120 leaves, and specifiable as 2100C/D or 2100CD variants.

Models in this family

  1. 2100CDproduced 1987–2007

    The Varian 2100CD is a high-energy linear accelerator manufactured between 1987 and 2007, part of the Clinac 2100 series, equipped with klystron power source, electron energies, and optional portal imaging, with multi-leaf collimator options of 80 or 120 leaves, and specifiable as 2100C/D or 2100CD variants.