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Manufacturer

Novellus

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4 entries

  1. 300Novellus

    Novellus ATHENA software is available for Novellus 300 mm tools that use the Proteus user interface.

    CategoryWet Processing / CleanWafer300mm
  2. 3290Novellus

    The Novellus / Varian 3290 is a PVD sputter physical vapor deposition system for 6-inch wafers.

    CategoryDeposition
  3. MI2Novellus

    Novellus MI2 is referenced as a sputtering system used to deposit titanium nitride.

  4. 3290 STQNovellus

    The Novellus / Varian 3290 STQ is a sputtering system designed for 6-inch wafers.

    CategoryDeposition