Canon 5500 iZA

Models in this family

1. 5500 iZA

   The Canon FPA-5500iZa is a very high throughput i-line stepper that exposes layers down to 350nm, either stand-alone or mix-and-match with 200mm or 300mm KrF and ArF scanners.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Wide-Field	—	—	Configuration option listed as Wide-Field.	waferpedia.com[1]

Sources