Waferpedia

Manufacturer

Nova

LinkedIn X Email

Looking for practical guidance on Nova? The reference remains the primary source; requests are private, the network is growing, and a relevant match is not guaranteed.

Request expert help →Share experience privately →

6 entries

  1. 600iNova

    The FEI Nova 600i (also called Nova NanoLab 600i) is a DualBeam system combining a field emission scanning electron microscope (FESEM) with a gallium focused ion beam (Ga FIB) for nanoscale prototyping, machining, characterization, and analysis of structures below 100 nm.

    CategoryMetrology & Inspection
  2. 10-160Nova

    The Nova 10-160 is an equipment model manufactured by Nova, with no further technical details provided in available sources.

  3. 3090Nova

    Nova NOVASCAN 3090 is a CMP metrology platform for semiconductor process control. Nova NOVASCAN 3090 supports measurement of solid areas, 2D structures, and 3D shape characterization with a single polarized channel from Deep-UV to Near-IR.

  4. NanoSEM 230 FE-SEMNova

    The Nova NanoSEM 230 is a field emission scanning electron microscope (FE-SEM).

    CategoryMetrology & Inspection
  5. 3090 NTSANova
  6. V 2600Nova

    The Nova V 2600 is a CMP (Chemical Mechanical Polisher) for 12-inch wafers.

    CategoryCMP