Waferpedia

Tool family

Edwards IQDP 40

Edwards1 entry

Models in this family

  1. The Edwards iQDP40 is a four-stage, positive displacement rotary dry vacuum pump designed for clean environments with water-cooled motor and no lubrication in the pumping chamber.

    Cited variants

    DesignationGenerationVintageChangesSource
    QDP40——Earlier production model with serial numbers 13940 and higher; iQDP40 has serial numbers 11210 and higher.scribd.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]scribd.comscribd.com