Tool family
Canon FPA 2500
Models in this family
The Canon FPA 2500 i 2 is a stepper for semiconductor lithography, with documented vintages of 1993 and 1994.
The Canon FPA 2500 i 3 is an i-line stepper for 8-inch wafers with a 5-inch reticle.
All entries
- FPA 2500 i 2Canon
The Canon FPA 2500 i 2 is a stepper for semiconductor lithography, with documented vintages of 1993 and 1994.
CategoryLithography8 specs - FPA 2500 i 3CanonCategoryLithography1 spec
- FPA 2500 i 3 i-LineCanon
The Canon FPA 2500 i 3 is an i-line stepper for 8-inch wafers with a 5-inch reticle.
CategoryLithography28 specs