Waferpedia

Tool family

Santa Clara Plastics SCP

Models in this family

  1. The Santa Clara Plastics SCP 8500 is a batch wafer processing system described as an 8-inch Piranha Clean unit.

  2. The Santa Clara Plastics SCP 9400 is a batch wafer processing system described as an 8-inch RCA clean tool.

  3. The Santa Clara Plastics SCP E 200 is a batch wafer processing system for 8-inch wafers, configured for etching and stripping processes.

All entries

  1. SCP 8500 Batch Wafer ProcessingSanta Clara Plastics

    The Santa Clara Plastics SCP 8500 is a batch wafer processing system described as an 8-inch Piranha Clean unit.

    CategoryWet Processing / Clean
    1 spec
  2. SCP 9400 Batch Wafer ProcessingSanta Clara Plastics

    The Santa Clara Plastics SCP 9400 is a batch wafer processing system described as an 8-inch RCA clean tool.

    CategoryWet Processing / Clean
    1 spec
  3. SCP E 200 Batch Wafer ProcessingSanta Clara Plastics

    The Santa Clara Plastics SCP E 200 is a batch wafer processing system for 8-inch wafers, configured for etching and stripping processes.

    CategoryEtch
    3 specs