Waferpedia

Tool family

Plasma-Therm Corial 200FA

Plasma-Therm1 entry

The Corial 200FA is a Plasma-Therm Corial brand product. The Corial 200FA is described as useful for pilot production and experimentation.

Models in this family

  1. The Corial 200FA is a Plasma-Therm Corial brand product. The Corial 200FA is described as useful for pilot production and experimentation.