Lam Research 2300 Selis

Models in this family

1. 2300 Selis

   The Lam 2300 Selis is a Lam Research etch chamber for dielectric etching, offered in a chamber-only configuration for 12-inch/300 mm wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   2300 SELIS - Chamber Only	—	—	Dielectric Etch process chamber; 300 mm version; chamber-only configuration.	fabsurplus.com[1]

Sources