Tokyo Electron Lithius

Models in this family

1. Lithius

   The Tokyo Electron Lithius is a coater and developer system that processes 12-inch wafers.

2. 

   Lithius Pro

   Tokyo Electron Lithius Pro is a coater/developer described as an immersion COT and DEV system with rinse processing at pre-/post-exposure.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   CLEAN TRACK LITHIUS Pro V	—	—	No differences from the base line stated in the source beyond the variant designation.	web.archive.org[1]
   CLEAN TRACK LITHIUS Pro V-i	—	—	No differences from the base line stated in the source beyond the variant designation.	web.archive.org[1]
   LITHIUS Pro V	—	—	High-productivity platform with 200 wph throughput upgradeable to 250 wph; optimized integration with exposure tool.	web.archive.org[1]
   LITHIUS Pro V-i	—	—	Variation of LITHIUS Pro V; details not specified in sources.	web.archive.org[1]
   LITHIUS Pro-i	—	—	Listed alongside LITHIUS Pro; likely a variant with i-line optimization.	web.archive.org[1]
   LITHIUS Pro DICE	—	2025	Announced December 2025; features defect control technology reducing resist coating defects by 50% or more; world-class productivity; improved environmental performance.	tel.com[2]
   LITHIUS Pro Z	—	—	Previous model provided for over a decade; preceded LITHIUS Pro DICE.	tel.com[2]

Sources