Waferpedia

Tool family

Espec EHS-412(M)

The Espec EHS-412(M) is a large highly accelerated stress test system for semiconductor testing. The EHS-412(M) operates at +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).

Models in this family

  1. The Espec EHS-412(M) is a large highly accelerated stress test system for semiconductor testing. The EHS-412(M) operates at +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).