Lam Research Vector is a PECVD deposition platform for dielectric film deposition.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| VECTOR | — | — | — | lamresearch.com[1] |
| VECTOR TEOS | — | — | — | lamresearch.com[1] |
| VECTOR AHM | — | — | — | lamresearch.com[1] |
| VECTOR MD | — | — | — | lamresearch.com[1] |
| VECTOR Strata | — | — | — | lamresearch.com[1] |
| VECTOR DT | — | — | — | lamresearch.com[1] |
| VECTOR TEOS 3D | — | — | — | lamresearch.com[1] |