Waferpedia

Tool family

Nikon NSR S 208

NikonLithography2 entries
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Models in this family

  1. NSR S 208 D

    Ultra-high productivity 248 nm scanner for 110 nm devices and sub-critical 90 nm layers.

  2. NSR S 208 D KrF

    The Nikon NSR S 208 D is a 248 nm KrF scanning system introduced in 2004 for volume production of 110 nm devices.

All entries

  1. NSR S 208 DNikon

    Ultra-high productivity 248 nm scanner for 110 nm devices and sub-critical 90 nm layers.

    CategoryLithography
    22 specs
  2. NSR S 208 D KrFNikon

    The Nikon NSR S 208 D is a 248 nm KrF scanning system introduced in 2004 for volume production of 110 nm devices.

    CategoryLithography
    14 specs