Nikon
NSR S 208 D
The Nikon NSR-S208D is a 248 nm deep UV scanner for 110 nm devices and sub-critical 90 nm layers. The NSR-S208D features a 0.82 NA lens and delivers >147 wph on 300 mm wafers.[1]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedA lithography stepper sits in the front end of pattern formation, after resist coating and before etch, implant, or deposition steps that copy the printed pattern into the wafer.
Applications
The Nikon NSR-S208D is intended for volume KrF applications, 110 nm devices, and sub-critical 90 nm layers.[1]
What do the numbers mean?
Power & electrical3
- Amp Rack[2]
Wafer handling3
Optics & imaging5
- Cymer Laser[2]
Performance3
Control & software4
Configuration & options4
- Air Conditioner[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wavelength does the Nikon NSR-S208D use?
The Nikon NSR-S208D uses 248 nm exposure.[1]
What is the exposure area of the Nikon NSR-S208D?
The Nikon NSR-S208D has a 26 by 33 mm exposure area.[1]
What device nodes is the Nikon NSR-S208D intended for?
The Nikon NSR-S208D is intended for 110 nm devices and sub-critical 90 nm layers.[1]
Not publicly documented
The following facts about the NSR S 208 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 208 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR S 208 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR S 208 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR S 208 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR S 208 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — nikonprecision.com (Jun 17, 2006)web.archive.org
- [2]Inventory photo
- [3]Inventory photo
- [4]Equipment inventory listing
Last updated Oct 3, 2026.
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