Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR S 208 D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR S 208 DNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR S 208 |
| Specifications | ||
| Configuration | — | Software ver. MCSW 180-P12/OCSW ver. 180-P10[1] |
| CIM | — | SECs[1] |
| Process | — | kRF[1] |
| Handler System | — | external FOUP system[1] |
| Factory Interface | — | SMIF[1] |
| Wavelength | — | 248 nm[2] |
| Lens NA | — | 0.82[2] |
| Exposure Area | — | 26 x 33 mm[2] |
| Reduction Ratio | — | 1/4[2] |
| Resolution | — | <110 nm[2] |
| Throughput (300 mm) | — | >147 wph[2] |
| Throughput (200 mm) | — | >165 wph[2] |
| Wafer Size | — | 200/300 mm[2] |
| Software Version | — | MCSW 180-P12 / OCSW ver. 180-P10[1] |
| Components | — | Amp Rack, Temperature Controller, Cymer Laser, Air Conditioner[1] |
| Throughput | — | 300 mm > 147 WPH; 200 mm > 165 WPH[2] |
| Included modules | — | Amp Rack; Temperature Controller; Cymer Laser; Air Conditioner[1] |
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