Nikon
NSR S 208 D KrF
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Nikon NSR S 208 D is a KrF scanning system operating at 248 nm. The Nikon NSR S 208 D is targeted for volume production of 110 nm devices and sub-critical 90 nm layers. The Nikon NSR S 208 D features an NA of 0.82, a 4x reduction, and accommodates 200 mm and 300 mm wafers.[1]
What it is
How it works
General reference — not yet source-verifiedA mask aligner or scanner in this class transfers circuit patterns from a photomask onto a photoresist-coated wafer using projection optics and controlled exposure.
A scanner in this class steps the exposure field across the wafer rather than exposing the full wafer at once.
Where it fits in the process flow
The Nikon NSR S 208 D is positioned for volume production of integrated circuit layers at the lithography step.[1]
Applications
What do the numbers mean?
Vintage & configurations
- 2004Introduction[1]
The NSR-S208D was introduced in 2004.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What lithography type is the Nikon NSR S 208 D?
The Nikon NSR S 208 D is a KrF scanning system.[1]
Not publicly documented
The following facts about the NSR S 208 D KrF are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the NSR S 208 D KrF are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR S 208 D KrF are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR S 208 D KrF are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR S 208 D KrF is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR S 208 D KrF are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — nikonprecision.com (Jun 23, 2006)web.archive.org
- [2]Inventory photo
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Oct 3, 2026.
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