Waferpedia

Tool family

YES 253B-2-2-2

Models in this family

  1. The MKS 253B-2-2-2 is a butterfly exhaust throttle valve that regulates gas removal from a vacuum chamber when used with an MKS controller.

    Cited variants

    DesignationGenerationVintageChangesSource
    253B-2-2-1——Identical to 253B-2-2-2 but includes Viton flapper seal (sealing butterfly valve)nanofab.utah.edu[1]
    253B-60-2-2——ASA 2" flange, inside diameter 2.362" (60.0 mm), no flapper seal, controllable conductance TBDnanofab.utah.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu