EV Group 40

Models in this family

1. 

   40 NT

   The EV Group 40 NT is an automated measurement system for metrology applications in semiconductor manufacturing, especially lithography and bonding.

2. 

   40 Top-to-Bottom Side Measurement

   The EVG 40 Top-to-Bottom Side Measurement System is a PC-based measurement system for 2-inch to 8-inch wafers and substrates, with a manual alignment stage and 120-230 V, 50/60 Hz power input.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   EVG 40NT	—	—	—	web.archive.org[1]

Sources