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EV Group

40 Top-to-Bottom Side Measurement

Metrology & InspectionEV Group 40 family
Research Quality: 50% complete
40 Top-to-Bottom Side Measurement — Inventory photo
Fig. 0140 Top-to-Bottom Side MeasurementInventory photo[1]

Power

120-230 V[1]

Performance

Manual Alignment Stage[1]

What it is

The EV Group 40 Top-to-Bottom Side Measurement System is an inspection and metrology tool for alignment accuracy measurements in double-sided lithography processes.[2]

The EV Group 40 Top-to-Bottom Side Measurement System handles wafers and substrates from two inches to eight inches.[1]

How it works

The EV Group 40 Top-to-Bottom Side Measurement System performs destruction-free alignment accuracy measurements.[2]

The EV Group 40 Top-to-Bottom Side Measurement System uses a manual alignment stage and a PC-based measurement system.[1]

Where it fits in the process flow

The EV Group 40 Top-to-Bottom Side Measurement System supports processes that involve double-sided lithography.[2]

Applications

The EV Group 40 Top-to-Bottom Side Measurement System is used for all processes that involve double-sided lithography.[2]

The EV Group 40 Top-to-Bottom Side Measurement System is applicable to wafers and substrates from two inches to eight inches.[1]

What do the numbers mean?

Power & electrical3

Voltage
120-230 V[1]
Accurate?
50/60 Hz[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Wafer handling2

Capable of handling up to 8"/200mm substrates / wafers[1]
Accurate?
Wafer Sizes
2, 3, 4, 5, 6, 8 inch (up to 200 mm)[1]
Accurate?

Performance3

Manual Alignment Stage[1]
Accurate?
Manual Alignment Stage
Yes[1]
Accurate?
Measurement Type
Destruction-free alignment accuracy[2]
Accurate?

Control & software3

PC-based Measurement System[1]
Accurate?
System computer, monitor, and keyboard[1]
Accurate?
PC-based Measurement System
Yes[1]
Accurate?

Configuration & options1

Vintage
2002[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
EVG 40NT———web.archive.org[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage120-230 V[1]
  • Configuration50/60 Hz[1]
  • Frequency50/60 Hz[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What does the EV Group 40 Top-to-Bottom Side Measurement System measure?

The EV Group 40 Top-to-Bottom Side Measurement System measures alignment accuracy for double-sided lithography.[2]

Does the EV Group 40 Top-to-Bottom Side Measurement System perform destructive testing?

The EV Group 40 Top-to-Bottom Side Measurement System performs destruction-free alignment accuracy measurements.[2]

What substrate sizes can the EV Group 40 Top-to-Bottom Side Measurement System handle?

The EV Group 40 Top-to-Bottom Side Measurement System handles wafers and substrates from two inches to eight inches.[1]

What stage configuration does the EV Group 40 Top-to-Bottom Side Measurement System use?

The EV Group 40 Top-to-Bottom Side Measurement System uses a manual alignment stage.[1]

What type of control or computing platform is part of the EV Group 40 Top-to-Bottom Side Measurement System?

The EV Group 40 Top-to-Bottom Side Measurement System uses a PC-based measurement system.[1]

Not publicly documented

The following facts about the 40 Top-to-Bottom Side Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 40 Top-to-Bottom Side Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 40 Top-to-Bottom Side Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 40 Top-to-Bottom Side Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 40 Top-to-Bottom Side Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 40 Top-to-Bottom Side Measurement are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]web.archive.org — evgroup.com (Sep 8, 2011)web.archive.org
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Last updated Oct 10, 2026.

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