Waferpedia

Tool family

Edwards IXL 1000 Dry

Edwards1 entry

Models in this family

  1. The Edwards IXL 1000 Dry is a dry pump model from Edwards.

    Cited variants

    DesignationGenerationVintageChangesSource
    iXL1000N——A variant with 1.1 kW power at ultimate, 0-40 slm typical purge flow (default 10), 168 kg weight, and 1/4 in tube fitting nitrogen connection.advancedvacuum.se[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]advancedvacuum.seadvancedvacuum.se