Ulvac SIV 500

Models in this family

1. SIV 500

   The Ulvac SIV 500 is an in-line sputtering system used for thin-film deposition, including indium tin oxide (ITO).

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   SIV 500 ITO	—	2016	Configured for ITO sputtering with P3 dedicated to ITO, O₂ MFC, and 13.56 MHz power supply/match to maintain ITO stoichiometry.	tarasemi.com[1]

Sources