Aixtron AIX G5 WW C

Models in this family

1. 

   AIX G5 WW C

   The AIX G5 WW C is a warm-wall planetary MOCVD system for silicon carbide (SiC) deposition from AIXTRON.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   AIX G5 WW C (SiC)	—	—	AIXTRON product page labels the AIX G5 WW C as the SiC variant of the AIX G5 WW C line.	aixtron.com[1]

Sources