Waferpedia

Tool family

Nikon NSR S 203

NikonLithography2 entries
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Models in this family

  1. NSR S 203 B

    The Nikon NSR S 203 B is a lithography system used for photolithography on 200 mm wafers.

  2. NSR S 203 B DUV

    The Nikon NSR S 203 B is a DUV scanner described as an 8-inch wafer tool.

All entries

  1. NSR S 203 BNikon

    The Nikon NSR S 203 B is a lithography system used for photolithography on 200 mm wafers.

    CategoryLithography
    43 specs
  2. NSR S 203 B DUVNikon

    The Nikon NSR S 203 B is a DUV scanner described as an 8-inch wafer tool.

    CategoryLithography
    1 spec