Waferpedia

Tool family

ASML PAS 2000

ASMLLithography1 entry

ASML's PAS 2000 was the company's first product and was described as a commercial and technical failure.

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Models in this family

  1. PAS 2000introduced 1984produced 1985–Legacy

    The PAS 2000 was ASML's first lithography product, introduced in 1984, and was a commercial and technical failure due to its oil-pressure wafer stage that leaked.