Tool family
Canon MPA 500 Fab Parts are spare components and accessories for the Canon MPA 500 system, including metrology and mask-related parts.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MPA 500 Fab Parts with IUC-M Meter | — | — | Includes IUC-M Meter | Equipment inventory listing[1] |
| MPA 500 Fab Parts with 6" Focus Mask | — | — | Includes 6" Focus Mask | Equipment inventory listing[2] |
| MPA 500 Fab Parts with 6" DR Mask | — | — | Includes 6" DR Mask | Equipment inventory listing[3] |
| MPA 500 Fab Parts with 5" DR Mask | — | — | Includes 5" DR Mask | Equipment inventory listing[4] |