Onto Innovation Nanospec 6100

Models in this family

1. Nanospec 6100

   The NanoSpec 6100 is an automated film thickness measurement system designed for measuring films on semiconductor and magnetic head substrates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Model 6150	—	—	Stage accommodates an optional automatic loader (Model 6150 stage).	cores.research.utdallas.edu[1]

Sources