Waferpedia

Tool family

KLA 2139

KLAMetrology & Inspection3 entries
LinkedIn X Email

Models in this family

  1. 2139

    The KLA-Tencor 2139 is a surface inspection system configured for 200mm wafer handling.

  2. 2139 Brightfield

    The KLA 2139 is a brightfield inspection system used in semiconductor manufacturing.

  3. 2139 UI Brightfield Patterned Surface Defect

    KLA 2139 UI is a brightfield patterned surface defect inspection system for 8-inch wafers.

All entries

  1. 2139KLA

    The KLA-Tencor 2139 is a surface inspection system configured for 200mm wafer handling.

    5 specs
  2. 2139 BrightfieldKLA

    The KLA 2139 is a brightfield inspection system used in semiconductor manufacturing.

    CategoryMetrology & Inspection
    25 specs
  3. 2139 UI Brightfield Patterned Surface DefectKLA

    KLA 2139 UI is a brightfield patterned surface defect inspection system for 8-inch wafers.

    CategoryMetrology & Inspection
    6 specs