Waferpedia

Tool family

STS 320

STS1 entry

The STS 320 is a parallel-plate reactive ion etching (RIE) tool for etching silicon, silicon nitride, and transition metals with volatile fluorides.

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Models in this family

  1. 320

    The STS 320 is a parallel-plate reactive ion etching (RIE) tool for etching silicon, silicon nitride, and transition metals with volatile fluorides.