STS

320

Research Quality: 30% complete

The STS 320 is a parallel-plate reactive ion etching (RIE) tool manufactured by Surface Technology Systems. The STS 320 is designed for etching silicon, silicon nitride, and transition metals using fluorine-based chemistries. The STS 320 uses an RF frequency of 13.56 MHz and has a driven electrode area of about 900 cm².^[1]

STS320

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Power

13.56 MHz^[1]

Vacuum

55 mtorr^[1]

Gas delivery

SF6, SF6+O2, CF4, CF4+O2^[1]

What is it?

The STS 320 is a parallel-plate RIE tool manufactured by Surface Technology Systems. It operates at an RF frequency of 13.56 MHz and has a driven electrode area of about 900 cm². The tool is used with fluorine-based chemistries such as SF6, SF6+O2, CF4, and CF4+O2.

What can it run?

Process applications and technology nodes documented for this tool.

Etching of silicon
Etching of silicon nitride
Etching of transition metals with volatile fluorides

Why won't it start?

Documented failure modes, common issues, and field considerations.

CF4 recipes may cause fluorocarbon polymer buildup on chamber walls and reduced etch rate over time (source: recipe description for STS 320 CF4).
Fluorocarbon residue from CF4-based recipes can affect later formation of electrical contacts (source: recipe description for STS 320 CF4).

What do the numbers mean?

Power & electrical1

RF Frequency: 13.56 MHz^[1]

Vacuum & pumping1

Pressure (typical): 55 mtorr^[1]

Gas & chemistry1

Process Gases: SF6, SF6+O2, CF4, CF4+O2^[1]

Configuration & options2

Reactive Ion Etch Type: Parallel-plate RIE^[1]
Driven Electrode Area: 900 cm²^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RF Frequency13.56 MHz^[1]
Process GasesSF6, SF6+O2, CF4, CF4+O2^[1]
Pressure (typical)55 mtorr^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 320 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 320 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 320 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 320 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 320 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 320 are on record.
Answerable by: an OEM parts catalog or a service engineer