Waferpedia

Tool family

CHA Mark 50

CHADeposition3 entries

Models in this family

  1. The CHA Mark 50 is a physical vapor deposition (PVD) system for thin-film deposition, capable of handling 6-inch wafers.

  2. The CHA Mark 50 is an electron-beam evaporator used for thin film deposition.

  3. The CHA Mark 50 Vacuum Evaporator is a vacuum evaporator with 3 phase, 208 VAC, 60 Hz, and 175 amps specified.

All entries

  1. Mark 50CHA

    The CHA Mark 50 is a physical vapor deposition (PVD) system for thin-film deposition, capable of handling 6-inch wafers.

    CategoryDeposition
    10 specs
  2. Mark 50 E-BeamCHA

    The CHA Mark 50 is an electron-beam evaporator used for thin film deposition.

    CategoryDeposition
    30 specs
  3. Mark 50 VacuumCHA

    The CHA Mark 50 Vacuum Evaporator is a vacuum evaporator with 3 phase, 208 VAC, 60 Hz, and 175 amps specified.

    CategoryDeposition
    9 specs