The Lam Research Exelan Dry is a dry etch chamber used in semiconductor manufacturing.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| V2 Exelan | — | 2005 | — | csisemi.com[1] |
| 2300 EXELAN | — | 2004 | — | fabsurplus.com[2] |
| EXELAN | — | 2000 | — | fabsurplus.com[3] |