Waferpedia

Tool family

YES 253B-2-50J-2

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate or shut off gas removal from a vacuum chamber when used with an MKS controller.

Models in this family

  1. The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate or shut off gas removal from a vacuum chamber when used with an MKS controller.

    Cited variants

    DesignationGenerationVintageChangesSource
    253B-2-50-2——Shown as the KF Style ISO flange example.nanofab.utah.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu