Waferpedia

Tool family

YES 15 F HMDS Vapor Prime

YESThermal / Diffusion1 entry
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Models in this family

  1. 15 F HMDS Vapor Prime

    The YES 15 F HMDS Vapor Prime Oven is a thermal processing tool for HMDS vapor priming, with a maximum operating temperature of 200 °C and a chamber size of 16 inches per side.