Tokyo Electron Formula Diffusion

Models in this family

1. Formula Diffusion

   The Tokyo Electron Formula Diffusion is a diffusion furnace for thermal processing, with a variant supporting 300 mm wafers and an aluminium oxide process.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Formula Diffusion Furnace Aluminium Oxide Process	—	2003	300 mm wafer size, aluminium oxide process	fabsurplus.com[1]

Sources