Waferpedia

Tool family

Lam Research Gasonics PEP 4800

Lam ResearchEtch2 entries

Models in this family

  1. The Lam Research Gasonics PEP 4800 DL is an etcher.

  2. The Lam / Novellus / Gasonics PEP 4800 DL Iridia is a dual-chamber etcher.

All entries

  1. Gasonics PEP 4800 DLLam Research

    The Lam Research Gasonics PEP 4800 DL is an etcher.

    CategoryEtch
    12 specs
  2. Gasonics PEP 4800 DL IridiaLam Research

    The Lam / Novellus / Gasonics PEP 4800 DL Iridia is a dual-chamber etcher.

    CategoryEtch
    1 spec