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Tool family

Lam Research 2300 Versys Kiyo 45

Lam ResearchEtch1 entry
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Models in this family

  1. 2300 Versys Kiyo 45

    The Lam Research 2300 Versys Kiyo 45 is a high-density plasma etch system for 300mm wafers, used for conductor and silicon etch applications.