Waferpedia

Tool family

Hitachi S 9380

Models in this family

  1. The Hitachi S 9380 is a scanning electron microscope (SEM) used for wafer inspection and measurement, designed for 12-inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    S-9380II———web.archive.org[1]
  2. The Hitachi S 9380 is a CD-SEM (Critical Dimension Scanning Electron Microscope).

  3. The Hitachi S 9380 II CD-SEM is a critical dimension scanning electron microscope.

All entries

  1. S 9380Hitachi

    The Hitachi S 9380 is a scanning electron microscope (SEM) used for wafer inspection and measurement, designed for 12-inch wafers.

    CategoryMetrology & Inspection
    9 specs
  2. S 9380 CD-SEMHitachi

    The Hitachi S 9380 is a CD-SEM (Critical Dimension Scanning Electron Microscope).

    CategoryMetrology & Inspection
    6 specs
  3. S 9380 II CD-SEMHitachi

    The Hitachi S 9380 II CD-SEM is a critical dimension scanning electron microscope.

    CategoryMetrology & Inspection
    13 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org