Waferpedia

Tool family

Yaskawa XU RC 6841 Atmospheric Wafer Robot

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Models in this family

  1. XU RC 6841 Atmospheric Wafer Robot

    The Yaskawa XU RC 6841 Atmospheric Wafer Robot is an atmospheric wafer robot manufactured by Yaskawa for 12-inch wafers, offered with a controller and compatible with the AMAT Centura FI Module.