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Tool family

EV Group 120 Automated Coater Processing

EV Group1 entry

EV Group 120 Automated Coater Processing System.

Models in this family

  1. The EV Group 120 Automated Coater Processing System is an automated coater for 6-inch and 8-inch wafers, built in 2015 and requiring 50/60 Hz, 3-phase, 4-wire plus ground power.