SUSS MicroTec ACS 200

Models in this family

1. 

   ACS 200 +

   The SUSS ACS 200 + is a coater and developer for semiconductor wafer processing, handling 6-inch or 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ACS 200 +	—	2007	—	Equipment inventory listing[1]

2. 

   ACS 200 Gen 3

   The SUSS ACS 200 Gen 3 is an automated coater/developer system for wafer processing with multiple bake and cool plates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ACS 200 Gen 3 Coater/Developer	Gen 3	2017	Configured as a coater/developer system with 4 developers and a 4D setup	Equipment inventory listing[2]

Sources