Aixtron AIX 2600

Models in this family

1. 

   2600 G 3 HT IC MOCVD Reactor

   The Aixtron 2600 G 3 HT IC MOCVD Reactor is a deposition tool for InGaN MOCVD epitaxy with support for 6 x 6-inch wafers.

2. 

   2600 G 3 HT MOCVD Reactor

   The Aixtron 2600 G 3 HT is a metal organic chemical vapor deposition reactor.

3. 

   2600 G 3 IC R MOCVD Reactor

   The Aixtron 2600 G 3 IC R is a MOCVD reactor configured for AlInGaP MOCVD epitaxy and 7 x 6-inch wafers.

4. 

   AIX 2600 G 3 IC R Planetary Reactor

   The Aixtron AIX 2600 G 3 IC R Planetary Reactor is a deposition system described as a 3-phase, 4-wire + ground, 50/60 Hz unit.

5. 

   AIX 2600 G 3 MOCVD Reactor

   The Aixtron AIX 2600 G 3 is a MOCVD reactor for 2, 3, and 4 inch wafers.

6. 

   AIX 2600 G 3 Planetary Reactor

   The Aixtron AIX 2600 G 3 Planetary Reactor is a deposition tool in the AIX 2600 family.

7. 

   AIX 2600 G 3 R MOCVD OMVPE

   The Aixtron AIX 2600 G 3 R is a MOCVD/OMVPE deposition system for GaAs or InP wafers, with wafer sizes stated as 2, 3, 4, and 6 inch.