Waferpedia

Tool family

Genmark Porta 300 Load Port

Genmark1 entry

Models in this family

  1. The Genmark Porta 300 Load Port is a load port for 300 mm wafer carriers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Porta300™ plus Load Port——Described as an advanced load port for 300 mm wafer carriers with BOLTS interface compliance, built-in SEMI E84 interface, barcode/IR/RF carrier ID reader options, and minimal particle, vibration, and noise generation.nidecgenmark.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nidecgenmark.comnidecgenmark.com