Waferpedia

Tool family

Lam Research Rainbow 4520 Oxide

Lam ResearchEtch1 entry

Models in this family

  1. The Lam Research Rainbow 4520 Oxide is an etch system for semiconductor manufacturing.

    Cited variants

    DesignationGenerationVintageChangesSource
    Rainbow 4520 Oxide Etcher———Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing