Waferpedia

Tool family

Buehler Ecomet 3000 Variable Speed

BuehlerCMP1 entry

Models in this family

  1. The Buehler Ecomet 3000 is a variable speed grinder/polisher with an 8-inch aluminum platen and speed range from 10 to 500 rpm.

    Cited variants

    DesignationGenerationVintageChangesSource
    EcoMet 3000 S——Low speed variant: maximum speed 80 rpm, minimum speed 1 rpm.scribd.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]scribd.comscribd.com