Waferpedia

Tool family

Espec TCC-151W-20

The Espec TCC-151W-20 is a rapid-rate thermal cycle chamber with a temperature change rate of 20 K/min.

Models in this family

  1. The Espec TCC-151W-20 is a rapid-rate thermal cycle chamber with a temperature change rate of 20 K/min.

    Cited variants

    DesignationGenerationVintageChangesSource
    TCC-151W——Has a temperature change rate of 15 K/min, compared to the 20 K/min of the TCC-151W-20.espec.co.jp[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp