Applied Materials Centura 5200 DPS Metal

Models in this family

1. Centura 5200 DPS Metal

   The Applied Materials Centura 5200 DPS Metal is a metal etching system with a decoupled plasma source, processing 6-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Centura 5200 DPS+	—	—	Metal etching system with DPS technology, supports SECS/GEM, accommodates 200mm and 300mm wafers	manufacturingtomorrow.com[1]

Sources